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Founded in April, 2007

Established Shanghai Guanghan Vaccum Technology Co., Ltd. & Be SEMI member in 2009

Passed ISO9001 & ISO14001 in 2011。

Identified as Shanghai high-tech enterprises in 2012

Established Shanghai Sheen Microeletronics Equipment Technology Co.,Ltd. in 2013

Established Sichuan Vast Microeletronics Co.,Ltd. in 2013

Provide equipment total solution for semiconductor production line;

Services in 2,3,4,5,6,8-inch semiconductor production line

Specialize in Litho, Implant, Thin Film, Etch and Diff

4,000 ㎡refurbished area ,1000㎡ clean room

Ex-stock for litho、implant 、PVD etc.

A large stock of spare parts are available

46 professional engineers, over 70 staff