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Shanghai Vastity Electronics Technology Co.,Ltd.(en)
Yougui Qin: +86-021-60891170-615 +86-18116276616
E-mail: ygqin@vastity.com.cn
number Product number description name manufacturer S/N size installation time position
1 VT14-001 Implanter Ion implantation machine Sumitomo Eaton Nova 131 6" 2012 Xuanchun Road
2 VT14-002 Implanter Ion implantation machine Sumitomo Eaton Nova 215 6" 2014 Bonded warehouse
3 VT14-003 Implanter Ion implantation machine EATON SED GSDIII 10 6" 2013 Xuanchun Road
4 VT14-004 Implanter Ion implantation machine Nisshin NISSIN   6" 2013 Bonded warehouse
5 VT14-005 Implanter Ion implantation machine Nisshin NISSIN   6" 2013 Bonded warehouse
6 VT14-006 Implanter Ion implantation machine Varian 0037279 6" 2015 Xuanchun Road
7 VT14-010 Stepper  Lithography Nikon 803164 6" 2013 Xuanchun Road
8 VT14-019 Stepper  Lithography Nikon 904042 6" 2014 Xuanchun Road
9 VT14-020 Stepper  Lithography Canon   5" 2012 Xuanchun Road
10 VT14-021 Lithography Lithography Canon 90080502 2"3" 2012 Xuanchun Road
11 VT14-022 Etcher Dry etching machine TEL 5K3311 6" 2013 Bonded warehouse
12 VT14-023 Etcher Dry etching machine TEL 5K3342 6" 2013 Bonded warehouse
13 VT14-024 Etcher Dry etching machine Shibaura 903B-06 6" 2013 Xuanqiu Road
14 VT14-025 Etcher Dry etching machine Shibaura 903B-05 6" 2013 Xuanqiu Road
15 VT14-026 Etcher Dry etching machine TEL 490364 6" 2013 Bonded warehouse
16 VT14-027 Etcher Dry etching machine TEL 490365 6" 2013 Bonded warehouse
17 VT14-028 Etcher Dry etching machine Hitachi, Ltd. 93E1437240 6" 2013 Bonded warehouse
18 VT14-029 Etcher Dry etching machine Alcan Tech 81030 6" 2013 Xuanqiu Road
19 VT14-030 Etcher Dry etching machine Alcan Tech 81026 6" 2013 Bonded warehouse
20 VT14-031 Etcher Dry etching machine Alcan Tech 81031 6" 2013 Xuanqiu Road
21 VT14-032 Etcher Dry etching machine Alcan Tech 81029 6" 2013 Bonded warehouse
22 VT14-033 Etcher Dry etching machine Shibaura   6" 2013 Bonded warehouse
23 VT14-034 Etcher Wet etching machine Semiconductor-Equipment Co., Ltd. J017 6" 2014 Bonded warehouse
24 VT14-035 Etcher Dry etching machine LAM RESEARCH 5055 5" 2014 Xuanqiu Road
25 VT14-036 Etcher Dry etching machine LAM RESEARCH 5074 5" 2014 Xuanqiu Road
26 VT14-038 Etcher Dry etching machine LAM RESEARCH 5134 5" 2014 Xuanqiu Road
27 VT14-039 Scrubber Brush machine DAINNIPPON SCREEN MFG. CO.,LTD. 57700-2278 6" 2013 Bonded warehouse
28 VT14-040 UV BAKE UV curing machine USHIO INC. 937002 6" 2013 Bonded warehouse
29 VT14-041 UV BAKE UV curing machine USHIO INC. 892004 6" 2013 Xuanqiu Road
30 VT14-042 UV BAKE UV curing machine USHIO INC. 892003 6" 2013 Xuanqiu Road
31 VT14-043 Reticle Inspection Mask tester TOKYO KOKUKEIKI K.K 3012 6" 2013 Xuanqiu Road
32 VT14-044 RTA Rapid annealing furnace AG ASSOCIATES 8911320-05 6" 2013 Xuanqiu Road
33 VT14-045 RTA Rapid annealing furnace AG ASSOCIATES 1C95199 6" 2013 Xuanqiu Road
34 VT14-046 OVEN Oven DAN SCIENCE CA1K40 6" 2013 Xuanqiu Road
35 VT14-047 Developer Developing machine DAINIPPON SCREEN MFG.CO.,LTD. 53700-6397 6" 2013 Bonded warehouse
36 VT14-048 Developer Developing machine TEL 291035 6" 2013 Bonded warehouse
37 VT14-049 Developer Developing machine TEL 291037 6" 2013 Bonded warehouse
38 VT14-050 Developer Developing machine TEL 615278 6" 2013 Xuanchun Road
39 VT14-051 Coater Coating machine DAINIPPON SCREEN MFG.CO.,LTD. 53700-6370 6" 2013 Xuanqiu Road
40 VT14-054 Coater Coating machine TEL 614106 6" 2013 Xuanchun Road
41 VT14-056 Coat/Deve  Adhesive developing machine SVS C000009 6" 2013 Xuanchun Road
42 VT14-057 Coat/Deve  Adhesive developing machine TEL 522760 6" 2014 Xuanchun Road
43 VT14-058 SOG Rotary coating machine DAINIPPON SCREEN MFG.CO.,LTD. 88700-4029 6" 2013 Bonded warehouse
44 VT14-059 Asher To the plastic machine Shibaura ATP003140 6" 2013 Xuanqiu Road
45 VT14-060 Asher To the plastic machine Plasma System Corp. 84038-84/7 6" 2012 Xuanchun Road
46 VT14-061 Asher To the plastic machine Plasma System Corp. 84077-85/4-2 6" 2013 Xuanchun Road
47 VT14-062 Asher To the plastic machine Plasma System Corp. 84077-85/4-3 6" 2013 Xuanchun Road
48 VT14-063 Asher To the plastic machine Plasma System Corp. 84077-85/4-8 6" 2013 Xuanchun Road
49 VT14-064 Asher To the plastic machine Plasma System Corp. 88051 6" 2014 Xuanqiu Road
50 VT14-065 CVD Chemical vapor deposition equipment NOVELLUS 97-38-3035 6" 2014 Xuanchun Road
51 VT14-066 CVD Chemical vapor deposition equipment Applied Materials 4683 6" 2014 Xuanqiu Road
52 VT14-067 LPCVD Low pressure chemical vapor deposition equipment DENKO SYSTEMS INC. 821-1030 6" 2013 Xuanqiu Road
53 VT14-069 LPCVD Low pressure chemical vapor deposition equipment DENKO SYSTEMS INC. 821-103C 6" 2013 Bonded warehouse
54 VT14-071 LPCVD Low pressure chemical vapor deposition equipment TOKYO ELECTRON LIMITED 300009450062 6" 2013 Xuanqiu Road
55 VT14-073 LPCVD Low pressure chemical vapor deposition equipment TOKYO ELECTRON LIMITED 880098 6" 2015 Bonded warehouse
56 VT14-074 LPCVD Low pressure chemical vapor deposition equipment TOKYO ELECTRON LIMITED 40042 6" 2015 Bonded warehouse
57 VT14-075 LPCVD Low pressure chemical vapor deposition equipment TOKYO ELECTRON LIMITED 01-MA3053 6" 2015 Bonded warehouse
58 VT14-077 LPCVD Low pressure chemical vapor deposition equipment TOKYO ELECTRON LIMITED 280012 6" 2015 Xuanqiu Road
59 VT14-078 Diff Diffusion furnace TOKYO ELECTRON LIMITED 880096 6" 2015 Bonded warehouse
60 VT14-079 Diff Diffusion furnace TOKYO ELECTRON LIMITED 01-MA3054 6" 2015 Bonded warehouse
61 VT14-080 Diff Diffusion furnace TOKYO ELECTRON LIMITED 01-MA3055 6" 2015 Bonded warehouse
62 VT14-081 Diff Diffusion furnace TOKYO ELECTRON LIMITED 880097 6" 2015 Xuanqiu Road
63 VT14-082 Diff Diffusion furnace TOKYO ELECTRON LIMITED 880095 6" 2015 Xuanqiu Road
64 VT14-083 Diff Diffusion furnace TOKYO ELECTRON LIMITED VF195152 6" 2013 Xuanqiu Road
65 VT14-084 Diff Diffusion furnace DENKO SYSTEMS INC. 821-1030 6" 2013 Xuanqiu Road
66 VT14-085 Diff Diffusion furnace DENKO SYSTEMS INC. 821-103B 6" 2013 Bonded warehouse
67 VT14-086 Diff Diffusion furnace DENKO SYSTEMS INC. 821-103B 6" 2013 Bonded warehouse
68 VT14-087 Diff Diffusion furnace DENKO SYSTEMS INC. 821-103B 6" 2013 Bonded warehouse
69 VT14-088 Diff Diffusion furnace DENKO SYSTEMS INC. 821-103B 6" 2013 Bonded warehouse
70 VT14-089 Diff Diffusion furnace DENKO SYSTEMS INC. 821-103B 6" 2013 Bonded warehouse
71 VT14-090 Diff Diffusion furnace TEL SAGAMI LIMITED 930070 6" 2013 Bonded warehouse
72 VT14-091 Diff Diffusion furnace Kokusai Electric Co., Ltd. DC3-10677-5 6" 2013 Xuanchun Road
73 VT14-093 SPUTTER Sputtering table Materials Research Corp. 48630 6" 2013 Xuanqiu Road
74 VT14-094 SPUTTER Sputtering table Tokyo Electron Arizona, Inc S74 6" 2013 Xuanqiu Road
75 VT14-095 SPUTTER Sputtering table Varian 88739-649 5" 2012 Xuanchun Road
76 VT14-097 RS Resistivity tester NAPSON 9005-133 6" 2013 Xuanchun Road
77 VT14-098 Reticle paticle Ins Photometric plate particle tester Yoshida   6" 2013 Xuanchun Road
78 VT15-001 X-RAY Boron phosphorus content tester RIGAKU INDUSTRIAL CORPORATION     2014 Xuanchun Road
79 VT15-258 Epitaxial Furnace Epitaxial furnace TOSHIBA MACHINE CO., LTD. 1203 6" 2014 Xuanqiu Road
80 VT15-259 Stepper Lithography Nikon 93027 6" 2015 Bonded warehouse
81 VT15-260 Stepper Lithography Nikon 93024 6" 2015 Bonded warehouse
82 VT15-261 Stepper Lithography Nikon 93051 6" 2015 Bonded warehouse
83 VT15-262 Stepper Lithography Nikon 93064 6" 2015 Bonded warehouse
84 VT15-263 Stepper Lithography Nikon 93050 6" 2015 Bonded warehouse
85 VT15-264 Stepper Lithography Nikon 93067 6" 2015 Xuanchun Road
86 VT15-265 Stepper Lithography Nikon 93026 6" 2015 Bonded warehouse
87 VT15-266 Stepper Lithography Nikon 94151 6" 2015 Bonded warehouse
88 VT15-269 Stepper Lithography Nikon 94035 6" 2015 Xuanchun Road
89 VT15-270 Stepper Lithography Nikon 94608 6" 2015 Xuanchun Road
90 VT15-271 Stepper Lithography Nikon 94627 6" 2015 Xuanchun Road
91 VT15-272 Etcher Etching machine LAM 1652 6" 2015 Xuanqiu Road
92 VT15-273 Etcher Etching machine LAM 1510 6" 2015 Xuanqiu Road
93 VT15-274 Etcher Etching machine LAM 1726 6" 2015 Xuanqiu Road
94 VT15-275 Etcher Etching machine LAM 1247 6" 2015 Xuanqiu Road
95 VT15-276 Etcher Etching machine LAM 1656 6" 2015 Xuanqiu Road
96 VT15-277 Etcher Etching machine LAM 1795 6" 2015 Xuanqiu Road
97 VT15-527 Stepper Lithography Nikon 801092 5   Xuanchun Road
98 VT15-528 Tester Strip width tester Hitachi,Ltd. 8607-05 5   Xuanchun Road
99 VT15-529 Coat/Deve  Adhesive developing machine TEL(TOKYO ELECTRON KYUSYU LIMITED) 615411 5   Xuanchun Road
100 VT15-530 Metrology & Inspection Plasma etching machine LAM RESEARCH 4050, 5   Xuanchun Road
101 VT15-531 Diffusion Diffusion furnace International Electrotechnical Corporation T2DC1-10981-1 5   Bonded warehouse
102 VT15-532 Etcher Plasma etching machine Plasma System Corp. 94030 5   Bonded warehouse
103 VT15-533 Tester Tester THERMA-WAVE TP5105 5   Bonded warehouse
104 VT15-534 Implanter Ion implantation machine SUMITOMO EATON NOVA CORPORATION F62 5   Bonded warehouse
105 VT15-536 Coat/Deve  Adhesive developing machine DAINIPPON SCREEN MFG CO., LTD. 56700-2172 5   Bonded warehouse
106 VT15-537 Etcher Plasma etching machine TEL(東京エレクトロン株式会社) K85660 5   Bonded warehouse
107 VT15-540 B P Tester Boron phosphorus content tester Rigaku Denki Kogyo Co., Ltd. JR24003     Bonded warehouse
108 VT15-541 Etcher Plasma etching machine LAM RESEARCH N/A     Xuanqiu Road
109 VT15-542 Etcher Plasma etching machine LAM RESEARCH 5129,     Xuanqiu Road
110 VT15-543   UV glue machine FUSION PU7A345AB     Xuanqiu Road
111 VT15-544 tape Film machine NITTO SEIKI     2016 Xuanqiu Road
112 VT15-545 tape Film machine NITTO SEIKI     2016 Xuanqiu Road
113 VT15-546 tape Film machine TAKATORI     2016 Xuanqiu Road
114 VT15-547 Implanter Ion implantation machine ION IMPLANT SYSTEM 037282   2016 Xuanchun Road
115 VT15-548 LTO Chemical vapor deposition equipment AMJ 5524 6 2016 Japan
116 VT15-549 Sputter Physical vapor deposition equipment AMJ 3136 6 2016 Japan
117 VT15-550 Predepo Injection machine AMJ M205 6 2016 Japan
118 VT15-551 stepper Lithography Nikon 96049 6 2016 Japan
119 VT15-552 stepper Lithography Nikon 96155 6 2016 Japan
120 VT15-553 stepper Lithography Nikon 96156 6 2016 Japan
121 VT15-554 stepper Lithography Nikon 96046 6 2016 Japan
122 VT15-555 stepper Lithography Nikon 96152 6 2016 Japan
123 VT15-556 LTO Chemical vapor deposition equipment AMJ 5420 6 2016 Japan
124 VT15-557 P-CVD Chemical vapor deposition equipment AMJ 5330 6 2016 Japan
125 VT15-558 RIE(Al-Si) Plasma etching machine AMJ 6468 6 2016 Japan
126 VT15-559 RIE(Al-Si) Plasma etching machine AMJ 6253 6 2016 Japan
127 VT15-560 Thickness Film thickness measuring instrument Nanometrics 0889-H6007 6 2016 Japan
128 VT15-561 Thickness Film thickness measuring instrument Nanometrics 0389-H6006 6 2016 Japan
129 VT15-562 Total reflection X-ray device(TREX) Defect measuring instrument TECHNOS A684140000 6 2016 Japan
130 VT15-563 αステップMeasuring device Probe station KLA 0391-0448 6 2016 Japan
131 VT15-564 シ-トResistors Square resistance meter KLA 950813RS3504 6 2016 Japan
132 VT15-565 Diffusion Diffusion furnace TOKYO ELECTRON LIMITED 920018 6 2016 Japan
133 VT15-566 Diffusion Diffusion furnace TOKYO ELECTRON LIMITED 920019 6 2016 Japan
134 VT15-567 Diffusion Diffusion furnace TOKYO ELECTRON LIMITED 920020 6 2016 Japan
135 VT15-568 Etching System Etching machine Applid Materials 7430 5 2016 Xuanqiu Road
136 VT15-569 Aligner Lithography Canon 2031454 5 2016 Japan
137 VT15-570 Aligner Lithography Canon 2041470 5 2016 Japan
138 VT15-571 Aligner Lithography Canon / 5 2016 Japan
139 VT15-572 Aligner Lithography Canon 103011 5 2016 Japan
140 VT15-573 Aligner Lithography Canon 304189 5 2016 Japan
141 VT15-574 Aligner Lithography Canon 310307 5 2016 Japan
142 VT15-575 Aligner Lithography Canon 501552 5 2016 Japan
143 VT15-576 Aligner Lithography Canon 501553 5 2016 Japan
144 VT15-577 Aligner Lithography Canon 9007667 5 2016 Japan
145 VT15-578 Dicer Thinning machine Disco   5 2016 Japan
146 VT15-579 Laser Marker Marking Machine "NEC laser Automation(Omron Laser Front)" 14 5 2016 Japan
147 VT15-580 Probing Machine Probe station Tokyo Electron 2848J00322 5 2016 Japan
148 VT15-581 Coater Coating machine DAINIPPON SCREEN MFG CO., LTD. 52700-1591 5 2016 Japan