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Lithography: STEPPER

Considering the requirements of the PSS process line wide,the size of ordinary exposure machine graphics and mask board is one-to-one,which can’t meet the demands of PSS line wide accuracy. The existing NIKON STEPPER is 5:1 stepper projection lithography. PSS was widely used in the industry worldwide, and second-hand NIKON stepper has been the standard of PSS process.



Spin coating developing equipment

Gum drops (developer) is uniformly coated on the substrate through high speed rotation, and passing the substrate through the robot to the hot plate for uniform drying, then cooling on the cold plate. automatic processing of the whole process from cassette to cassette


MALN BODY
TRANSFER ROBOT
SPIN UNIT
MULTI-STAGE OVEN